Exciting Possibilities of Soft X-ray Emission Spectroscopy as Chemical State Analysis in EPMA and FESEM

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Exciting Possibilities of Soft X-ray Emission Spectroscopy as Chemical State Analysis in EPMA and FESEM

A novel wavelength dispersive soft X-ray emission spectrometer (WD-SXES) has been developed. It covers nominally the X-ray energy range between 50 and 210 eV [1, 2]. One of the characteristic features of the WD-SXES is parallel detection of the signal so that it can be used like a conventional energy dispersive spectrometer. One other feature is a high energy resolution, which is about 0.2 eV. ...

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ژورنال

عنوان ژورنال: Microscopy and Microanalysis

سال: 2014

ISSN: 1431-9276,1435-8115

DOI: 10.1017/s1431927614005145